A Bulk Micromachined Electromagnetic Micro-Power Generator for an Ambient Vibration-energy-harvesting System
This paper presents a micro-fabricated electromagnetic power generator for an ambient vibration energy harvesting system. The proposed power generator utilized a bulk micro-machined silicon spring, a copper coil, and NdFeB magnet. In order to reduce the resonant frequency and increase the displacement of the proof mass, we developed a gimbal suspension structure for the fabrication of the silicon spring. The NdFeB permanent magnet was applied as an inertial mass to increase the effective mass of the total spring system. The fabricated spring was assembled using a lowcost Polydimethylsiloxane (PDMS) packaging substrate with a micro-coil, which had a lower DC resistance than a micro-fabricated planar coil. The system was specially designed to scavenge low ambient vibrations of several tens of hertz and low accelerations of under 1 g. The fabricated energy harvester had a 1 ¡¿ 1 ¡¿ 0.6 cm3 size and generated 102 ??W of electrical power to a 100 ?Ø load at 201 mVpeak-to-peak from a vibration of 0.4 g at 53 Hz. The normalized power density was 1.06 mW/cm3¡¤g2.
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