A New Micromachinined Bandpass Filter on a Quartz Substrate
A new class of three dimensional(3D) micromachined microwave planar filter at K-band is presented. The filter shows a wide bandpass chracteristic of 36% with the insertion loss of 1.2 dB at 19.11 GHz, and can be applicable in high power monolithic microwave integrated circuits (MMIC).