A sandpaper-inspired flexible and stretchable resistive sensor for pressure and strain measurement

We report very small shape-factored microstructures developed via a simple and cost-effective approach, enabling a high degree of sensitivity in a low-pressure regime (<2.67 kPa). The surface intertexture on the counter electrode and irregular microstructures with a high surface area developed on the base electrode help reduce the shape factor, allowing the device to deform more easily under pressure. Moreover, the irregular patterns with higher unloaded surface area strengthen the tunneling current sufficiently at low pressure. Furthermore, the fabricated features enable the device to perform as a flexible and stretchable sensing mechanism; the outstanding performance was achieved through a novel and feasible fabrication from a low-surface-energy template without surfactant coating. An ultra-low hysteresis of 3.17%, a high sensitivity of 0.3954 kPa⁻¹, a fast response time of 0.49 s and stability over 6000 cycles were achieved. Finally, the sensing capability was examined by gentle finger tapping and arbitrary movement of the sensor placed on the forefinger. The current platform can be a key component for diverse applications such as muscle movement, speech detection, and health monitoring systems.

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