Publications Domestic-journal [2005]

  1. Home
  2. Publications
  3. all
Plasma Etching of Silicon Oxynitride in a Low-Pressure C2F6 Plasma

Plasma Etching of Silicon Oxynitride in a Low-Pressure C2F6 Plasma

  • Oct 15, 2005
  • Journal of the Korea Physical Society

    Byungwhan KIM, Jeong KIM, Soo Hong LEE, Jae Yeong PARK and Byung Teak LEE

RF MEMS 부품 연구 개발 동향

RF MEMS 부품 연구 개발 동향

  • Apr 28, 2005
  • The Engineering Magazine For Electronic Components Industry
차세대이동통신용 RFMEMS 부품과 그 응용

차세대이동통신용 RFMEMS 부품과 그 응용

  • Apr 28, 2005
  • 전기전자재료학회지

Publication Years

Featured Publications

A flexible and multimodal biosensing patch integrated with microfluidics for chronic wound monitoring

  • 2024, Chemical Engineering Journal

A Breathable and Strain-Insensitive Multi-Layered E-SkinPatch for Digital Healthcare Wearables

  • 2024, Advanced Functional Materials

A MOFs-Derived Hydroxyl-Functionalized Hybrid Nanoporous Carbon Incorporated Laser-Scribed Graphene-Based Multimodal Skin Patch for Perspiration Analysis and Electrocardiogram Monitoring

  • 2024, Advanced Functional Materials

Polymeric multilayered planar spring-based hybrid nanogenerator integrated with a self-powered vibration sensor for automotive vehicles IoT applications

  • 2024, Nano Energy

V2CTX-MXene-functionalized fluoropolymer composite nanofibrous mat-based high-performance triboelectric nanogenerator for self-powered human activity and posture monitoring

  • 2024, Nano Energy