Publications Domestic-journal [2005]

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Plasma Etching of Silicon Oxynitride in a Low-Pressure C2F6 Plasma

Plasma Etching of Silicon Oxynitride in a Low-Pressure C2F6 Plasma

  • Oct 15, 2005
  • Journal of the Korea Physical Society

    Byungwhan KIM, Jeong KIM, Soo Hong LEE, Jae Yeong PARK and Byung Teak LEE

RF MEMS 부품 연구 개발 동향

RF MEMS 부품 연구 개발 동향

  • Apr 28, 2005
  • The Engineering Magazine For Electronic Components Industry
차세대이동통신용 RFMEMS 부품과 그 응용

차세대이동통신용 RFMEMS 부품과 그 응용

  • Apr 28, 2005
  • 전기전자재료학회지

Publication Years

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