Publications International-journal [2005]

Surface Micromachined High Frequency Inductors in Electroplating and Screen Printing Process

Surface Micromachined High Frequency Inductors in Electroplating and Screen Printing Process

Dec 6, 2005
Integrated Ferroelectrics

H. H, Lee and J. Y. Park

Fully Integrated Piezoelectric RF MEMS Switched with Ultra Low Voltage operation

Fully Integrated Piezoelectric RF MEMS Switched with Ultra Low Voltage operation

Nov 9, 2005
Integrated Ferroelectrics

H. K. Seo and J. Y. Park

Oxide via hole formation using magnetically enhanced reactive ion etching

Oxide via hole formation using magnetically enhanced reactive ion etching

Nov 1, 2005
Surface Engineering

B. Kim and J. Y. Park

Design, fabrication and RF performances of two different types of piezoelectrically actuated Ohmic MEMS switches

Design, fabrication and RF performances of two different types of piezoelectrically actuated Ohmic MEMS switches

Sep 23, 2005
JOURNAL OF MICROMECHANICS AND MICROENGINEERING

H. C. Lee, J. H. Park, J. Y. Park, H. J. Nam, and J. U. Bu

Piezoelectrically actuated RF MEMS DC contact switches with low voltage operation

Piezoelectrically actuated RF MEMS DC contact switches with low voltage operation

Apr 30, 2005
IEEE MWCL (Microwave and Wireless Components Letters)

H. C. Lee, J. Y. Park, and J. U. Bu

Silicon Bulk Micromachined High Q Film Bulk Acoustic Resonator Devices with Mo/AlN/Mo Structures

Silicon Bulk Micromachined High Q Film Bulk Acoustic Resonator Devices with Mo/AlN/Mo Structures

Feb 1, 2005
Integrated Ferroelectrics

H. C. Lee, J. Y. Park, and J. U. Bu