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Micromachined Millimeter-Wave Cavity Resonators

Micromachined Millimeter-Wave Cavity Resonators

In this paper, micromachined millimeter-wave cavity resonators ar presented. One-port and two-port cavity resonators at Ka-band are designed using 3D design software, HP HFSSTMHFSSTM ver. 5.5 Cavity resonators are fabricated on Si substrate, which is etched down for the cavity, bonded with a Quartz wafer in which metal patterns for the feeding line coupling slot are formed. One-port resonator shows the resonant frequency of 39.34 GHz, the return loss of 14.5 dB, and the loaded Q(QL)Q(QL) of 150. Two-port cavity resonator shows the resonant frequency of 39 GHz, the insertion and return losses of 4.6dB and 19,9dB, the loaded(QLQL) and unloaded Q(QU)Q(QU)) of 44.3 and 107, respectively.

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