Thermally Driven Thin Film Bulk Acoustic Resonator Voltage Controlled Oscillators Integrated with Microheater Elements
In this letter, we report on thermally driven thin film bulk acoustic resonator (TFBAR) voltage-controlled oscillators (VCOs) integrated with a microheater element. The oscillation frequency of TFBAR VCOs is controlled by applying different power (or bias voltage) to the microheaters implemented on the TFBAR membrane. The TFBARs with the microheater elements are fabricated by Si bulk micromachining technology. The series feedback schematic TFBAR VCO has an oscillation frequency of 3.566 GHz, an output power of 21 dBm, and a phase noise of 110 dBc/Hz at an offset frequency of 100 kHz. The measured frequency controllability and the measured temperature coefficient of resistance (TCR) of the heater element are 3.19 MHz/V and 0.24%/C, respectively, with a resistance of 88.1 at room temperature.
Similar Publications:
In this article, an actively formed dual anchor structure was newly designed and applied to improve the tuning range and mechanical reliability of an RF micr...
In this letter, fully embedded passive triplexer and quintplexer module into organic packaging substrate were presented for US CDMA handset applications. Fir...
In this article, compact quintplexer modules with apassive triplexer circuit were newly designed, implemented, comparedfor US-CDMA handset applications. The ...
In this article, lattice-type LC balanced-to-unbalanced (balun) embedded into a multilayered organic package substrate have been designed, fabricated, and ch...
In this article, fully embedded lumped LC-quadrature hybrid coupler are designed, fabricated, and characterized into multilayered organic packaging substrate...
In this article, fully embedded and miniaturized diplexer passive circuit device has been developed and characterized for dual‐band/mode CDMA handset appli...
In this article, fully embedded and miniaturized diplexer passive circuit device has been developed and characterized for dual-band/mode CDMA handset applica...
In this paper, fully embedded circular-stacked spiral inductors are investigated into a multilayered PCB substrate for low cost and miniaturized RF system on...
In this article, silicon bulk micromachined RF MEMS switch with four cantilever piezoelectric actuators has been designed, fabricated, and characterized for ...
This article presents a new circuit to generate a higher-order derivative Gaussian pulse for the impulse radio ultra-wideband(IR-UWB) communication systems. ...